Invention Grant
- Patent Title: Thin film material transfer method
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Application No.: US16498596Application Date: 2018-03-21
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Publication No.: US11180367B2Publication Date: 2021-11-23
- Inventor: Aravind Vijayaraghavan , Christian Berger
- Applicant: THE UNIVERSITY OF MANCHESTER
- Applicant Address: GB Manchester
- Assignee: THE UNIVERSITY OF MANCHESTER
- Current Assignee: THE UNIVERSITY OF MANCHESTER
- Current Assignee Address: GB Manchester
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: GB1704950 20170328
- International Application: PCT/GB2018/050733 WO 20180321
- International Announcement: WO2018/178634 WO 20181004
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00 ; G01L9/00

Abstract:
A method of transferring a two-dimensional material such as graphene onto a target substrate for use in the fabrication of micro- and nano-electromechanical systems (MEMS and NEMS). The method includes providing the two-dimensional material in a first lower state of strain; and applying the two-dimensional material onto the target substrate whilst the two-dimensional material is under a second higher state of strain. A device comprising a strained two-dimensional material suspended over a cavity.
Public/Granted literature
- US20200048082A1 THIN FILM MATERIAL TRANSFER METHOD Public/Granted day:2020-02-13
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