Invention Grant
- Patent Title: In-line wet bench device and method for the wet-chemical treatment of semiconductor wafers
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Application No.: US15536614Application Date: 2015-12-09
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Publication No.: US11183408B2Publication Date: 2021-11-23
- Inventor: Anika Weihrauch
- Applicant: HANWHA Q CELLS GMBH
- Applicant Address: DE Bitterfeld-Wolfen
- Assignee: HANWHA Q CELLS GMBH
- Current Assignee: HANWHA Q CELLS GMBH
- Current Assignee Address: DE Bitterfeld-Wolfen
- Agency: Christensen, Fonder, Dardi & Herbert PLLC
- Priority: DE102014119090.4 20141218
- International Application: PCT/DE2015/100528 WO 20151209
- International Announcement: WO2016/095900 WO 20160623
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/02

Abstract:
An in-line wet bench device for the wet-chemical treatment of semiconductor wafers, comprising a plurality of conveying rollers, each of which is rotatable about an axis of rotation, for the in-line transport of semiconductor wafers along a conveying direction, wherein the axes of rotation are arranged parallel to one another and perpendicular to the conveying direction, the conveying rollers having a cylindrical conveying section which extends axially along the respective axis of rotation and forms a conveying surface in the shape of a cylindrical sleeve. The conveying surface has at least one smooth region with surface roughnesses of less than 10 μm when viewed in the axial direction and rough regions with surface roughnesses of more than 100 μm axially adjacent to the smooth region.
Public/Granted literature
- US20180330975A1 IN-LINE WET BENCH DEVICE AND METHOD FOR THE WET-CHEMICAL TREATMENT OF SEMICONDUCTOR WAFERS Public/Granted day:2018-11-15
Information query
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