Invention Grant
- Patent Title: Methods for forming three-dimensional memory device with support structure and resulting three-dimensional memory device
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Application No.: US16670571Application Date: 2019-10-31
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Publication No.: US11183512B2Publication Date: 2021-11-23
- Inventor: Zongliang Huo , Haohao Yang , Wei Xu , Ping Yan , Pan Huang , Wenbin Zhou
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Priority: CN201910522873.1 20190617
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/311 ; H01L27/11556

Abstract:
Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack, a plurality of channel structures, a slit structure, and a source structure. The memory stack may be over a substrate and may include interleaved a plurality of conductor layers and a plurality of insulating layers extending laterally in the memory stack. The plurality of channel structures may extend vertically through the memory stack into the substrate. The slit structure may extend vertically and laterally in the memory stack and divide the plurality of memory cells into at least one memory block. The slit structure may include a plurality of protruding portions and a plurality of recessed portions arranged vertically along a sidewall of the slit structure.
Information query
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