Invention Grant
- Patent Title: Method for manufacturing a semiconductor structure, semiconductor structure, and electronic device
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Application No.: US15674837Application Date: 2017-08-11
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Publication No.: US11183559B2Publication Date: 2021-11-23
- Inventor: Mattias B. Borg , Kirsten E. Moselund , Heike E. Riel , Heinz Schmid
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Daniel Morris
- Priority: GB1421182 20141128
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/16 ; H01L21/02 ; H01L29/78

Abstract:
A method for manufacturing a semiconductor structure comprises the steps of: providing a substrate including a first semiconductor material; forming a dielectric layer on a surface of the substrate; forming an opening in the dielectric layer having a bottom reaching the substrate; providing a second semiconductor material in the opening and on the substrate, the second semiconductor material being en-capsulated by a further dielectric material thereby forming a filled cavity; melting the second semiconductor material in the cavity; recrystallizing the second semi-conductor material in the cavity; laterally removing the second semiconductor material at least partially for forming a lateral surface at the second semiconductor material; and forming a third semiconductor material on the lateral surface of the second semiconductor material, wherein the third semiconductor material is different from the second semiconductor material.
Public/Granted literature
- US20170365660A1 METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE, SEMICONDUCTOR STRUCTURE, AND ELECTRONIC DEVICE Public/Granted day:2017-12-21
Information query
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