Invention Grant
- Patent Title: Semiconductor device having buried gate structure and method for fabricating the same
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Application No.: US16691335Application Date: 2019-11-21
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Publication No.: US11183579B2Publication Date: 2021-11-23
- Inventor: Dong-Soo Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2019-0071564 20190617
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/423 ; H01L29/49 ; H01L21/28 ; H01L27/108 ; H01L21/3115

Abstract:
Disclosed is a semiconductor device for improving a gate induced drain leakage and a method for fabricating the same, and the method for fabricating semiconductor device may include forming a trench in a substrate; forming a gate dielectric layer over the trench, embedding a first dipole inducing portion in the gate dielectric layer on a lower side of the trench, filling a lower gate over the first dipole inducing portion, embedding a second dipole inducing portion in the gate dielectric layer on an upper side of the trench and forming an upper gate over the lower gate.
Information query
IPC分类: