Invention Grant
- Patent Title: MRAM MTJ top electrode connection
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Application No.: US16732385Application Date: 2020-01-02
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Publication No.: US11183627B2Publication Date: 2021-11-23
- Inventor: Sheng-Chau Chen , Cheng-Tai Hsiao , Cheng-Yuan Tsai , Hsun-Chung Kuang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/02 ; H01L43/12

Abstract:
Some embodiments relate to a memory device. The memory device includes a memory cell overlying a substrate, the memory cell includes a data storage structure disposed between a lower electrode and an upper electrode. An upper interconnect wire overlying the upper electrode. A first inter-level dielectric (ILD) layer surrounding the memory cell and the upper interconnect wire. A second ILD layer overlying the first ILD layer and surrounding the upper interconnect wire. A sidewall spacer laterally surrounding the memory cell. The sidewall spacer has a first sidewall abutting the first ILD layer and a second sidewall abutting the second ILD layer.
Information query
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