Invention Grant
- Patent Title: Structured grating component, imaging system and manufacturing method
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Application No.: US15734238Application Date: 2019-11-11
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Publication No.: US11189391B2Publication Date: 2021-11-30
- Inventor: Gereon Vogtmeier , Dorothee Hermes , Bo Liu , Andre Yaroshenko , Sandeep Unnikrishnan , Johannes Wilhelmus Maria Jacobs
- Applicant: KONINKLIJKE PHILIPS N.V. , NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Applicant Address: NL Eindhoven; NL The Hague
- Assignee: KONINKLIJKE PHILIPS N.V.,NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Current Assignee: KONINKLIJKE PHILIPS N.V.,NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Current Assignee Address: NL Eindhoven; NL The Hague
- Agent Larry Liberchuk
- Priority: EP18205877 20181113
- International Application: PCT/EP2019/080772 WO 20191111
- International Announcement: WO2020/099280 WO 20200522
- Main IPC: G01K1/06
- IPC: G01K1/06 ; G21K1/06 ; G02B5/18 ; A61B6/00

Abstract:
The invention relates to a method of manufacturing a structured grating, a corresponding structured grating component (1) and an imaging system. The method comprising the steps of: providing (110, 120, 130) a catalyst (30) on a substrate (20), the catalyst (20) having a grating pattern; growing (140) nanostructures (50) on the catalyst (30) so as to form walls (52) and trenches (54) based on the grating pattern; and filling (160) the trenches (54) between the walls (52) of nanostructures (50) using an X-ray absorbing material (70). The invention provides an improved method for manufacturing a structured grating and such structured grating component (1), which is particularly suitable for dark-field X-ray imaging or phase-contrast imaging.
Public/Granted literature
- US20210313086A1 STRUCTURED GRATING COMPONENT, IMAGING SYSTEM AND MANUFACTURING METHOD Public/Granted day:2021-10-07
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