Invention Grant
- Patent Title: Magnetic filter tube
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Application No.: US16883326Application Date: 2020-05-26
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Publication No.: US11189468B2Publication Date: 2021-11-30
- Inventor: Bin Liao , Xiaoping Ouyang , Qingsong Hua , Jun Luo , Lin Chen , Xu Zhang , Xianying Wu , Pan Pang , Ran Han , Minju Ying , Weifeng He , Guangyu He
- Applicant: Beijing Normal University , Wenli (Guangdong) Technology Co., Ltd.
- Applicant Address: CN Beijing; CN Yunfu
- Assignee: Beijing Normal University,Wenli (Guangdong) Technology Co., Ltd.
- Current Assignee: Beijing Normal University,Wenli (Guangdong) Technology Co., Ltd.
- Current Assignee Address: CN Beijing; CN Yunfu
- Agency: Troutman Pepper Hamilton Sanders LLP
- Agent Christopher C. Close, Jr.
- Priority: CN201911239897.2 20191206
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/32
Abstract:
The present invention discloses a magnetic filter tube, and relates to the technical field of magnetic filters. The magnetic filter tube includes a first rectangular tube and a second rectangular tube, where one end of the first rectangular tube is fixedly connected to one end of the second rectangular tube; the other end of the first rectangular tube forms an inlet of the magnetic filter tube; the inlet of the magnetic filter tube is connected with a cathode target flange; the other end of the second rectangular tube forms an outlet of the magnetic filter tube; the outlet of the magnetic filter tube is connected with a vacuum chamber; an inner wall of the first rectangular tube and an inner wall of the second rectangular tube are each provided with a protrusion and a groove; the protrusion is filled with cold water.
Public/Granted literature
- US20210175053A1 MAGNETIC FILTER TUBE Public/Granted day:2021-06-10
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