Invention Grant
- Patent Title: Bonding apparatus and bonding method
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Application No.: US16499869Application Date: 2018-03-22
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Publication No.: US11189594B2Publication Date: 2021-11-30
- Inventor: Osamu Watanabe , Yoshihito Hagiwara , Tomonori Nakamura
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JPJP2017-067597 20170330
- International Application: PCT/JP2018/011382 WO 20180322
- International Announcement: WO2018/180881 WO 20181004
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00

Abstract:
A bonding apparatus and a bonding method are provided. The bonding apparatus bonds a semiconductor die to a substrate by thermocompression through an adhesive material. This bonding apparatus is provided with: a bonding tool which has a bonding surface that holds the semiconductor die through a first portion of a tape, and a pair of first tape constraining surfaces that are arranged so as to sandwich the bonding surface and constrain a second portion of the tape: tape constraining mechanisms which have a second tape constraining surface that presses the tape against the first tape constraining surfaces; and a control part which controls the movements of the bonding tool and the tape constraining mechanisms.
Public/Granted literature
- US20200098721A1 BONDING APPARATUS AND BONDING METHOD Public/Granted day:2020-03-26
Information query
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