Invention Grant
- Patent Title: Embedded MRAM device formation with self-aligned dielectric cap
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Application No.: US16578729Application Date: 2019-09-23
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Publication No.: US11189783B2Publication Date: 2021-11-30
- Inventor: John Arnold , Dominik Metzler , Ashim Dutta , Donald Canaperi
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent L. Jeffrey Kelly
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L43/02 ; H01L27/22 ; H01L43/12 ; H01L43/10 ; H01L43/08 ; H01L41/27 ; H01L41/22 ; H01L43/04 ; G11C11/16

Abstract:
Methods for forming an integrated circuit are provided. Aspects include providing a wafer substrate having an embedded memory area interconnect structure and an embedded non-memory area interconnect structure, the memory area interconnect structure comprising metal interconnects formed within a first interlayer dielectric, recessing a portion of the memory area interconnect structure, forming a bottom electrode contact on the recessed portion of the memory area interconnect structure, forming a bottom electrode over the bottom electrode contact, forming a protective dielectric layer over the non-memory area interconnect structure, and forming memory element stack layers on a portion of the bottom electrode.
Public/Granted literature
- US20210091301A1 EMBEDDED MRAM DEVICE FORMATION WITH SELF-ALIGNED DIELECTRIC CAP Public/Granted day:2021-03-25
Information query
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