Invention Grant
- Patent Title: Using acoustic reflector to reduce spurious modes
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Application No.: US16422494Application Date: 2019-05-24
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Publication No.: US11190164B2Publication Date: 2021-11-30
- Inventor: Ting-Ta Yen , Jeronimo Segovia Fernandez , Bichoy Bahr , Peter Smeys
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/13 ; H03H9/05 ; H03H9/10 ; H03H9/15

Abstract:
A micromechanical system (MEMS) resonator includes a base substrate. A piezoelectric layer has a first electrode attached to a first surface of the piezoelectric layer and a second electrode attached to a second surface of the piezoelectric layer opposite the first electrode. The first electrode is bounded by a perimeter edge. A patterned acoustic mirror is formed on a top surface of the first electrode opposite the piezoelectric layer, such that the patterned acoustic mirror covers a border strip of the top surface of the first electrode at the perimeter edge and does not cover an active portion of the top surface of the first electrode.
Public/Granted literature
- US20200373908A1 Using Acoustic Reflector to Reduce Spurious Modes Public/Granted day:2020-11-26
Information query
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