Invention Grant
- Patent Title: Polishing method and polishing apparatus
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Application No.: US15898028Application Date: 2018-02-15
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Publication No.: US11192216B2Publication Date: 2021-12-07
- Inventor: Hiromitsu Watanabe , Kuniaki Yamaguchi , Itsuki Kobata , Yutaka Wada
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP2013-220327 20131023
- Main IPC: B24B57/00
- IPC: B24B57/00 ; B24B37/04 ; B24B37/34

Abstract:
A polishing method of polishing a substrate while preventing coarse particles from being discharged onto a polishing pad is disclosed. In this polishing method, a substrate is brought into sliding contact with a polishing pad while a polishing liquid, which has passed through a filter, is supplied onto the polishing pad. The polishing method includes: passing the polishing liquid through the filter while increasing a physical quantity of the polishing liquid until the physical quantity reaches a predetermined set value, the physical quantity being one of flow rate and pressure of the polishing liquid; and polishing the substrate W on the polishing pad while supplying the polishing liquid that has passed through the filter onto the polishing pad.
Public/Granted literature
- US20180169831A1 POLISHING METHOD AND POLISHING APPARATUS Public/Granted day:2018-06-21
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