Invention Grant
- Patent Title: Image measurement method, image measurement program, image measurement device, and object manufacture method
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Application No.: US16095215Application Date: 2016-04-22
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Publication No.: US11195294B2Publication Date: 2021-12-07
- Inventor: Motoi Murakami , Junichi Kubota
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- International Application: PCT/JP2016/062860 WO 20160422
- International Announcement: WO2017/183211 WO 20171026
- Main IPC: G06T7/60
- IPC: G06T7/60 ; G01B11/02 ; G06T7/50 ; G01B11/24 ; G06T7/00
Abstract:
To contribute to improved usability, an image measurement method includes selectably displaying geometric shape-related information in a measurement target, selectably displaying a measurement candidate of the measurement target based on a geometric shape corresponding to the selected geometric shape-related information (S38), and outputting a calculation result of the selected measurement candidate.
Public/Granted literature
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