Invention Grant
- Patent Title: Load lock for a substrate container and device having such a load lock
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Application No.: US16967221Application Date: 2019-02-06
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Publication No.: US11195735B2Publication Date: 2021-12-07
- Inventor: Uwe Beier
- Applicant: Uwe Beier
- Applicant Address: DE Ottendorf-Okrilla
- Assignee: Uwe Beier
- Current Assignee: Uwe Beier
- Current Assignee Address: DE Ottendorf-Okrilla
- Agency: Maier & Maier, PLLC
- Priority: DE102018102762.1 20180207
- International Application: PCT/DE2019/100123 WO 20190206
- International Announcement: WO2019/154462 WO 20190815
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677

Abstract:
A load lock for a substrate container for receiving flat substrates, wherein the load lock has a load chamber for receiving the substrate container that has a bottom, a ceiling, a rear wall, a front wall, a first side wall and a second side wall that connect the rear wall to the front wall, and wherein a carrier unit for receiving the substrate container is arranged in the load chamber. Here, it is provided that the load chamber can be divided into a first part and a second part along a dividing plane to open the load chamber, wherein the dividing plane extends toward the rear wall offset from the front wall through the first side wall, the second side wall, the bottom and the ceiling of the load chamber.
Public/Granted literature
- US20210082723A1 LOAD LOCK FOR A SUBSTRATE CONTAINER AND DEVICE HAVING SUCH A LOAD LOCK Public/Granted day:2021-03-18
Information query
IPC分类: