Invention Grant
- Patent Title: Substrate treatment apparatus and manufacturing method of a semiconductor device
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Application No.: US16282533Application Date: 2019-02-22
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Publication No.: US11195744B2Publication Date: 2021-12-07
- Inventor: Motoki Fujii , Takuo Ohashi , Daisuke Nishida
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-160629 20180829
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01J37/32 ; C23C16/40 ; C23C16/34

Abstract:
A substrate treatment apparatus according to an embodiment of the present invention includes a chamber, a stage, a gas discharger, a plasma generator, and a rotation mechanism. The stage supports a semiconductor substrate in the chamber. The gas discharger discharges a film formation gas toward the semiconductor substrate from a position opposing the stage. The plasma generator is provided on the gas discharger and generates plasma in the chamber during discharge of the film formation gas. The rotation mechanism rotates the stage during generation of the plasma.
Public/Granted literature
- US20200075391A1 SUBSTRATE TREATMENT APPARATUS AND MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE Public/Granted day:2020-03-05
Information query
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