Invention Grant
- Patent Title: Vertical transport field-effect transistors having germanium channel surfaces
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Application No.: US15945121Application Date: 2018-04-04
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Publication No.: US11195764B2Publication Date: 2021-12-07
- Inventor: Choonghyun Lee , Pouya Hashemi , Takashi Ando
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Erik Johnson
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8238 ; H01L21/02 ; H01L21/225 ; H01L29/78 ; H01L29/66 ; H01L27/092 ; H01L29/10 ; H01L29/165 ; H01L29/04 ; H01L21/324

Abstract:
A method for fabricating a semiconductor device including vertical transport fin field-effect transistors (VTFETs) is provided. The method includes forming a bottom spacer on a first device region associated with a first VTFET and a second device region associated with a second VTFET, forming a liner on the bottom spacer, on a first fin structure including silicon germanium (SiGe) formed in the first device region and on a second fin structure including SiGe formed in the second device region, and forming crystalline Ge having a hexagonal structure from the SiGe by employing a Ge condensation process to orient a (111) direction of the crystalline Ge in a direction of charge flow for a VTFET.
Public/Granted literature
- US20190311958A1 VERTICAL TRANSPORT FIELD-EFFECT TRANSISTORS HAVING GERMANIUM CHANNEL SURFACES Public/Granted day:2019-10-10
Information query
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