Invention Grant
- Patent Title: High performance nanosheet fabrication method with enhanced high mobility channel elements
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Application No.: US16592580Application Date: 2019-10-03
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Publication No.: US11195832B2Publication Date: 2021-12-07
- Inventor: Mark I. Gardner , H. Jim Fulford
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/092 ; H01L29/786 ; H01L29/161 ; H01L29/423 ; H01L21/8238 ; H01L29/24

Abstract:
A semiconductor device includes a first transistor pair formed over a substrate. The first transistor pair includes a n-type transistor and a p-type transistor that are stacked over one another. The n-type transistor has a first channel region that includes one or more first nano-channels with a first bandgap value. The one or more first nano-channels extend laterally along the substrate, are stacked over the substrate and spaced apart from one another. The p-type transistor has a second channel region that includes one or more second nano-channels made of a compound material having a second bandgap value based on a predetermined material ratio of the compound material. The one or more second nano-channels extend laterally along the substrate, are stacked over the substrate and spaced apart from one another.
Public/Granted literature
- US20210104522A1 HIGH PERFORMANCE NANOSHEET FABRICATION METHOD WITH ENHANCED HIGH MOBILITY CHANNEL ELEMENTS Public/Granted day:2021-04-08
Information query
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