Invention Grant
- Patent Title: Staircase structures for three-dimensional memory device double-sided routing
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Application No.: US16139000Application Date: 2018-09-22
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Publication No.: US11195846B2Publication Date: 2021-12-07
- Inventor: Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/522 ; H01L23/528 ; H01L27/11565 ; H01L27/1157

Abstract:
Embodiments of staircase structures for three-dimensional (3D) memory devices double-sided routing are disclosed. In an example, a 3D memory device includes a substrate, a memory stack disposed above the substrate and including conductor/dielectric layer pairs stacked alternatingly, and an array of memory strings each extending vertically through an inner region of the memory stack. An outer region of the memory stack includes a first staircase structure disposed on the substrate and a second staircase structure disposed on the substrate. First edges of the conductor/dielectric layer pairs in the first staircase structure along a vertical direction away from the substrate are staggered laterally toward the array of memory strings. Second edges of the conductor/dielectric layer pairs in the second staircase structure along the vertical direction away from the substrate are staggered laterally away from the array of memory strings.
Public/Granted literature
- US20200006378A1 STAIRCASE STRUCTURES FOR THREE-DIMENSIONAL MEMORY DEVICE DOUBLE-SIDED ROUTING Public/Granted day:2020-01-02
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