Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16670598Application Date: 2019-10-31
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Publication No.: US11195851B2Publication Date: 2021-12-07
- Inventor: Jae Taek Kim , Young Ock Hong
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2019-0064474 20190531
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L23/522 ; H01L27/11582 ; H01L23/528 ; H01L27/11573

Abstract:
The present technology provides a semiconductor memory device. The semiconductor memory device includes a source film spaced from a substrate and disposed on the substrate, a conductive contact plug penetrating the source film, and a dummy stack body including dummy interlayer insulating films and sacrificial insulating films alternately stacked on the conductive contact plug.
Public/Granted literature
- US20200381447A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-12-03
Information query
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