Invention Grant
- Patent Title: Ferroelectric memory device
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Application No.: US16894986Application Date: 2020-06-08
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Publication No.: US11195858B2Publication Date: 2021-12-07
- Inventor: Kunifumi Suzuki , Masumi Saitoh
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-167604 20190913
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/11587 ; H01L27/11582 ; H01L27/11507 ; H01L27/11585 ; H01L27/1158 ; H01L27/11514 ; H01L27/1159

Abstract:
Provided is a semiconductor memory device according to an embodiment including: a stacked body including gate electrode layers stacked in a first direction; a semiconductor layer provided in the stacked body and extending in the first direction; and a gate insulating layer provided between the semiconductor layer and at least one of the gate electrode layers, and the gate insulating layer including a first region containing a first oxide including at least one of a hafnium oxide and a zirconium oxide, in which a first length of the at least one of the gate electrode layers in the first direction is larger than a second length of the first region in the first direction.
Public/Granted literature
- US20210082956A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-03-18
Information query
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