Invention Grant
- Patent Title: High responsivity high bandwidth photodiode and method of manufacture
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Application No.: US16478625Application Date: 2018-02-20
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Publication No.: US11195962B2Publication Date: 2021-12-07
- Inventor: Andrew C Davidson
- Applicant: Newport Corporation
- Applicant Address: US CA Irvine
- Assignee: Newport Corporation
- Current Assignee: Newport Corporation
- Current Assignee Address: US CA Irvine
- Agent Brian F. Swienton; Edward Scott Trask
- International Application: PCT/US2018/018818 WO 20180220
- International Announcement: WO2018/156516 WO 20180830
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L31/101 ; H01L31/18 ; H01L31/0304

Abstract:
A high responsivity, high bandwidth photodiode is disclosed which includes at least one substrate, at least one n+ type layer may be formed on the at substrate and configured to receive at least a portion of an incident optical signal from the substrate, at least one supplemental layer formed on the n+ type layer and configured to receive at least a portion of the incident optical signal from the n+ type layer, at least absorbing layer formed on the supplemental layer and configured to receive at least a portion of the incident optical signal from the supplemental layer, at least one angled facet formed on the substrate and configured to direct at least a portion of the incident optical signal to at least one of the n+ type layer, the supplemental layer, and the absorbing layer at angle of incidence from 15° to 89° from a normal angle of incidence.
Information query
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