Disclosed herein are techniques for improving the light emitting efficiency of micro light emitting diodes. According to certain embodiments, micro-LEDs having small physical dimensions are fabricated on III-nitride materials with semi-polar crystal lattice orientations to reduce the surface recombination of excess charge carriers that does not generate photons and to reduce the polarization induced internal field that may cause energy band shift and aggravate the Quantum-Confined Stark Effect, thereby increasing the peak quantum efficiencies and/or reducing the peak efficiency current density of the micro-LEDs.