Invention Grant
- Patent Title: Encapsulation topography-assisted self-aligned MRAM top contact
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Application No.: US16572281Application Date: 2019-09-16
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Publication No.: US11195993B2Publication Date: 2021-12-07
- Inventor: Michael Rizzolo , Nicholas Anthony Lanzillo , Benjamin D. Briggs , Lawrence A. Clevenger
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent L. Jeffrey Kelly
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/02 ; H01L27/22 ; H01F10/32 ; H01F41/32 ; G11C11/16

Abstract:
Encapsulation topography-assisted techniques for forming self-aligned top contacts in MRAM devices are provided. In one aspect, a method for forming an MRAM device includes: forming MTJs on interconnects embedded in a first dielectric; depositing an encapsulation layer over the MTJs; burying the MTJs in a second dielectric; patterning a trench in the second dielectric over the MTJs exposing the encapsulation layer over tops of the MTJs which creates a topography at the trench bottom; forming a metal line in the trench over the topography; recessing the metal line which breaks up the metal line into segments separated by exposed peaks of the encapsulation layer; recessing the exposed peaks of the encapsulation layer to form recesses at the tops of the MTJs; and forming self-aligned contacts in the recesses. An MRAM device is also provided.
Public/Granted literature
- US20210083179A1 Encapsulation Topography-Assisted Self-Aligned MRAM Top Contact Public/Granted day:2021-03-18
Information query
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