Invention Grant
- Patent Title: Coupled MEMS resonator
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Application No.: US16607165Application Date: 2019-02-06
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Publication No.: US11196402B2Publication Date: 2021-12-07
- Inventor: Antti Jaakkola
- Applicant: KYOCERA Tikitin Oy
- Applicant Address: FI Espoo
- Assignee: KYOCERA Tikitin Oy
- Current Assignee: KYOCERA Tikitin Oy
- Current Assignee Address: FI Espoo
- Agency: Ziegler IP Law Group, LLC
- Priority: FI20185112 20180208
- International Application: PCT/FI2019/050086 WO 20190206
- International Announcement: WO2019/155119 WO 20190815
- Main IPC: H03H9/02
- IPC: H03H9/02 ; B81B3/00 ; B81B7/04 ; H01L41/09 ; H03H9/05 ; H03H9/24

Abstract:
A microelectromechanical resonator includes a support structure, a resonator element suspended to the support structure, and an actuator for exciting the resonator element to a resonance mode. The resonator element includes a plurality of adjacent sub-elements each having a length and a width and a length-to-width aspect ratio of higher than 1 and being adapted to a resonate in a length-extensional, torsional or flexural resonance mode. Further, each of the sub-elements is coupled to at least one other sub-element by one or more connection elements coupled to non-nodal points of the of said resonance modes of the sub-elements for exciting the resonator element into a collective resonance mode.
Public/Granted literature
- US20200304093A1 COUPLED MEMS RESONATOR Public/Granted day:2020-09-24
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