Invention Grant
- Patent Title: MEMS microphone with hybrid packaging structure
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Application No.: US16942325Application Date: 2020-07-29
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Publication No.: US11197079B2Publication Date: 2021-12-07
- Inventor: Jinghua Ye
- Applicant: ZILLTEK TECHNOLOGY (SHANGHAI) CORP. , ZILLTEK TECHNOLOGY CORP.
- Applicant Address: CN Shanghai; TW Hsinchu
- Assignee: ZILLTEK TECHNOLOGY (SHANGHAI) CORP.,ZILLTEK TECHNOLOGY CORP.
- Current Assignee: ZILLTEK TECHNOLOGY (SHANGHAI) CORP.,ZILLTEK TECHNOLOGY CORP.
- Current Assignee Address: CN Shanghai; TW Hsinchu
- Agent Clement Cheng
- Priority: CN202010286670.X 20200413
- Main IPC: H04R1/00
- IPC: H04R1/00 ; H04R1/04 ; B81B7/00 ; H04R1/06 ; H04R3/00 ; H04R19/04

Abstract:
A MEMS microphone with a hybrid packaging structure is provided. The microphone comprises: a first circuit board; a second circuit board, spaced apart from the first circuit board and parallel to the first circuit board; a packaging cover, covering the second circuit board, and forming an acoustic cavity with the second circuit board; wherein the first circuit board and the second circuit board form an accommodating space in which a pressure sensor is disposed. In the present invention, the chip and electronics of the MEMS microphone are installed on two different circuit boards, respectively, so that an interior space of the microphone is fully utilized, a good heat dissipation is achieved, a better sound transmission effect is achieved, and the microphone can be widely used.
Public/Granted literature
- US20210321184A1 MEMS MICROPHONE WITH HYBRID PACKAGING STRUCTURE Public/Granted day:2021-10-14
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