Invention Grant
- Patent Title: MEMS devices and processes
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Application No.: US16606932Application Date: 2018-04-17
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Publication No.: US11197103B2Publication Date: 2021-12-07
- Inventor: Marek Sebastian Piechocinski
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: GB Edinburgh
- Assignee: Cirrus Logic International Semiconductor Ltd.
- Current Assignee: Cirrus Logic International Semiconductor Ltd.
- Current Assignee Address: GB Edinburgh
- Agency: Jackson Walker L.L.P.
- Priority: GB1708905 20170605
- International Application: PCT/GB2018/050998 WO 20180417
- International Announcement: WO2018/197838 WO 20181101
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R1/08 ; B01D46/10 ; B81B7/00 ; B81C1/00 ; H04R19/00
Abstract:
MEMS devices comprise a filter configured and arranged to inhibit the entry of particles into at least a region of the interior of the substrate cavity from a region underlying the substrate.
Information query
