Invention Grant
- Patent Title: Holding apparatus for electrostatically holding a component, including a base body joined by diffusion bonding, and process for its manufacture
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Application No.: US16750517Application Date: 2020-01-23
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Publication No.: US11201075B2Publication Date: 2021-12-14
- Inventor: Stefan Hoescheler , David Kieven , Marcel Ziemann , Carsten Pampuch
- Applicant: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Applicant Address: DE Berlin
- Assignee: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Current Assignee: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Current Assignee Address: DE Berlin
- Agency: Caesar Rivise, PC
- Priority: DE102019101657.6 20190123
- Main IPC: H01T23/00
- IPC: H01T23/00 ; H01L21/683

Abstract:
A holding apparatus, which is adapted for electrostatically holding a component, in particular a wafer, comprises an electrically insulating base body, which comprises a first pair of base body plates, which are connected to one another in a planar manner via a joint connection, and an electrode device with at least one electrode layer, which is arranged to generate an electrostatic holding force and extends parallel to the extension of the base body plates along the joining connection, wherein the joining connection comprises a diffusion bond connection, wherein the at least one electrode layer is connected in a planar manner to the respectively adjacent base body plate, and the at least one electrode layer has a contact section, which is arranged for electrically contacting the at least one electrode layer. Methods for manufacturing the holding apparatus are also described.
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