Invention Grant
- Patent Title: Bonding apparatus and method
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Application No.: US16675039Application Date: 2019-11-05
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Publication No.: US11201133B2Publication Date: 2021-12-14
- Inventor: Joo Nyung Jang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2018-0149841 20181128
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L27/32 ; H01L23/498 ; H01L21/66

Abstract:
A bonding apparatus and method includes: a stage configured to fix a first electric component; a pressing unit configured to press a conductive adhesive film and a second electric component onto the first electric component; a driver configured to control movement of the pressing unit along a direction; and a plurality of sensors at different positions on the stage and configured to sense a change in capacitance with the pressing unit, wherein the pressing unit includes a flat metal material in first regions facing the plurality of sensors.
Public/Granted literature
- US20200168581A1 BONDING APPARATUS AND METHOD Public/Granted day:2020-05-28
Information query
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