Invention Grant
- Patent Title: Semiconductor memory device including multiple conductive line layers
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Application No.: US16454765Application Date: 2019-06-27
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Publication No.: US11201160B2Publication Date: 2021-12-14
- Inventor: Hee Bum Hong , Yongrae Cho
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2018-0149652 20181128
- Main IPC: H01L27/11
- IPC: H01L27/11 ; G11C5/14 ; G11C11/412

Abstract:
Disclosed is a semiconductor memory device comprising a plurality of memory cells each including an access transistor, a pull-up transistor, and a pull-down transistor on a substrate, a first line layer on the memory cells and including a first lower landing pad and a second lower landing pad, a second line layer on the first line layer and including a ground line having an opening and an upper landing pad in the opening, and a third line layer including a word line on the second line layer. The ground line is electrically connected through the first lower landing pad to a terminal of the pull-down transistor. The word line is electrically connected through the upper landing pad and the second lower landing pad to a terminal of the access transistor.
Public/Granted literature
- US20200168617A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-05-28
Information query
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