Invention Grant
- Patent Title: Image sensor device and method
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Application No.: US16568586Application Date: 2019-09-12
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Publication No.: US11201183B2Publication Date: 2021-12-14
- Inventor: Yen-Chang Chu , Yeur-Luen Tu , Cheng-Yuan Tsai
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A system and method for forming pixels in an image sensor is provided. In an embodiment, a semiconductor device includes an image sensor including a first pixel region and a second pixel region in a substrate, the first pixel region being adjacent to the second pixel region. A first anti-reflection coating is over the first pixel region, the first anti-reflection coating reducing reflection for a first wavelength range of incident light. A second anti-reflection coating is over the second pixel region, the second anti-reflection coating reducing reflection for a second wavelength range of incident light that is different from the first wavelength range.
Public/Granted literature
- US20200006408A1 Image Sensor Device and Method Public/Granted day:2020-01-02
Information query
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