Vertically stacked multilayer high-density RRAM
Abstract:
Certain aspects of the present disclosure generally relate to a vertically stacked multilayer resistive random access memory (RRAM) and methods for fabricating such an RRAM. The vertically stacked multilayer RRAM generally includes a planar substrate layer and a plurality of metal-insulator-metal (MIM) stacks, each MIM stack structure of the plurality of MIM stacks comprising a plurality of MIM structures extending orthogonally above the planar substrate.
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