Invention Grant
- Patent Title: FinFET resistive switching device having interstitial charged particles for memory and computational applications
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Application No.: US16410179Application Date: 2019-05-13
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Publication No.: US11201244B2Publication Date: 2021-12-14
- Inventor: Joel P. de Souza , Babar Khan , Arvind Kumar , Yun Seog Lee , Ning Li , Devendra K. Sadana
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Randall Bluestone
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/207 ; H01L29/66 ; H01L29/08 ; H01L29/10 ; H01L29/167 ; G11C11/54

Abstract:
Embodiments of the invention are directed to a resistive switching device (RSD). A non-limiting example of the RSD includes a fin-shaped element formed on a substrate, wherein the fin-shaped element includes a source region, a central channel region, and a drain region. A gate is formed over a top surface and sidewalls of the central channel region. The fin-shaped element is doped with impurities that generate interstitial charged particles configured to move interstitially through a lattice structure of the fin-shaped element under the influence of an electric field applied to the RSD.
Information query
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