Invention Grant
- Patent Title: Physical quantity sensor, physical quantity sensor device, complex sensor device, inertial measurement unit, and vehicle
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Application No.: US16201198Application Date: 2018-11-27
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Publication No.: US11204367B2Publication Date: 2021-12-21
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2017-228264 20171128
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08 ; B81B5/00 ; G01P15/18 ; G01P3/00

Abstract:
A physical quantity sensor includes a substrate, a support portion fixed to the substrate, a movable body which is displaceable in a first direction with respect to the support portion and has a movable electrode provided therein, and a fixed electrode fixed to the substrate. The fixed electrode includes first and second fixed electrode fingers positioned on one side of the support portion, third and fourth fixed electrode fingers positioned on the other side thereof. The movable electrode includes first to fourth movable electrode fingers which face the first to fourth fixed electrode fingers in the first direction, respectively.
Public/Granted literature
Information query
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