Invention Grant
- Patent Title: Methods and apparatuses for effluent monitoring for brush conditioning
-
Application No.: US16564175Application Date: 2019-09-09
-
Publication No.: US11205582B2Publication Date: 2021-12-21
- Inventor: Bradley Scott Withers , Corey Alan Hughes , Erik Scott Nelson , Steven Kenneth Christie , Brent Allan Best
- Applicant: Illinois Tool Works Inc.
- Applicant Address: US IL Glenview
- Assignee: Illinois Tool Works Inc.
- Current Assignee: Illinois Tool Works Inc.
- Current Assignee Address: US IL Glenview
- Agency: McAndrews, Held & Malloy, Ltd.
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/677 ; B24B29/00 ; H01L21/02 ; B24D13/14 ; H01L21/67 ; B24B53/14 ; B24B57/02
Abstract:
A system for monitoring contamination level of effluent of an offline brush conditioning system includes a first set of reservoirs configured to collect first effluents from corresponding portions of a first brush and a second set of reservoirs configured to collect second effluents from corresponding portions of a second brush, and the first and second effluents are from a fluid used to condition the first and second brushes that are configured to clean a surface of a semiconductor wafer. An effluent contamination monitor is configured to monitor contamination levels of the first and second effluents, wherein the monitored contamination levels may provide feedback for use in the brush conditioning.
Public/Granted literature
- US20200006162A1 METHODS AND APPARATUSES FOR EFFLUENT MONITORING FOR BRUSH CONDITIONING Public/Granted day:2020-01-02
Information query
IPC分类:
