Invention Grant
- Patent Title: Driving system having reduced vibration transmission
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Application No.: US16038385Application Date: 2018-07-18
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Publication No.: US11205937B2Publication Date: 2021-12-21
- Inventor: Keng Yew Song , Ka Shing Kwan , Yue Zhang , Xiao Liang Chen , Chu Fan Feng
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: H02K5/24
- IPC: H02K5/24 ; H02K41/035 ; H01L23/00

Abstract:
A driving system has a driving motor body operative to produce a driving force for driving an object to move in reciprocating directions. A pivotal support is located between the driving motor body and a machine base for supporting the driving motor body on the machine base. The pivotal support causes at least a portion of the driving motor body to rotate relative to the machine base in an opposite direction to a direction of the driving force produced by the driving motor body to drive the object, so as to reduce vibration transmission to the machine base.
Public/Granted literature
- US20200028407A1 DRIVING SYSTEM HAVING REDUCED VIBRATION TRANSMISSION Public/Granted day:2020-01-23
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