A micro piezoelectric pump module includes a microprocessor, a driving element, and a piezoelectric pump. The driving element is connected to the microprocessor to receive a modulating signal and a control signal and to output a driving signal. The driving signal includes a driving voltage and a driving frequency. The piezoelectric pump is actuated by the driving signal, and the piezoelectric pump is set to be actuated at an actuation frequency and be applied with an actuation voltage value. The microprocessor drives the driving element to output the driving voltage having an initial voltage value at the driving frequency to the piezoelectric pump, and adjusts the driving frequency to the same with the actuation frequency. After the driving frequency is adjusted to reach the actuation frequency, the microprocessor drives the driving element to gradually increase the initial voltage value to reach the actuation voltage value.