Invention Grant
- Patent Title: System and method for cleaning contact elements and support hardware using functionalized surface microfeatures
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Application No.: US16684453Application Date: 2019-11-14
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Publication No.: US11211242B2Publication Date: 2021-12-28
- Inventor: Alan E. Humphrey , Jerry J. Broz , Bret A. Humphrey , Alex S. Poles
- Applicant: INTERNATIONAL TEST SOLUTIONS INC.
- Applicant Address: US NV Reno
- Assignee: INTERNATIONAL TEST SOLUTIONS INC.
- Current Assignee: INTERNATIONAL TEST SOLUTIONS INC.
- Current Assignee Address: US NV Reno
- Agency: DLA Piper LLP US
- Main IPC: B24D3/00
- IPC: B24D3/00 ; H01L21/02 ; H01L21/67

Abstract:
A cleaning material, device, and method for predictably cleaning the contact elements and support hardware of a tester interface, such as a probe card and a test socket, in which the cleaning pad has a predetermined configuration appropriate for the particular pin contact elements and a substrate having a defined functionalized surface topology and geometry which can be introduced into the testing apparatus during the normal testing operations. The cleaning material has a predetermined topography with a plurality of functional 3-dimensional (3D) microstructures that provide performance characteristics which are not possible with a non-functionalized and flat surface.
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