Invention Grant
- Patent Title: Assemblies containing PMOS decks vertically-integrated with NMOS decks, and methods of forming integrated assemblies
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Application No.: US16402570Application Date: 2019-05-03
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Publication No.: US11211292B2Publication Date: 2021-12-28
- Inventor: Scott E. Sills , Kurt D. Beigel
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/822 ; H01L21/8238 ; H01L21/84 ; H01L27/12 ; H01L23/528 ; H01L27/092 ; H01L27/115 ; H01L23/522 ; H01L27/06 ; H01L29/786 ; H01L29/78

Abstract:
Some embodiments include an assembly having a CMOS tier. The CMOS tier includes a PMOS deck and an NMOS deck, with the decks being vertically offset relative to one another. The PMOS deck has p-channel transistors which are substantially identical to one another, and the NMOS deck has n-channel transistors which are substantially identical to one another. An insulative region is between the PMOS deck and the NMOS deck. The CMOS tier has one or more circuit components which include one or more of the n-channel transistors coupled with one or more of the p-channel transistors through one or more conductive interconnects extending through the insulative region. Some embodiments include methods of forming assemblies to comprise one or more CMOS tiers.
Public/Granted literature
Information query
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