Invention Grant
- Patent Title: Semiconductor device and method of manufacture
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Application No.: US16787097Application Date: 2020-02-11
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Publication No.: US11211301B2Publication Date: 2021-12-28
- Inventor: Chunting Wu , Ching-Hou Su , Chih-Pin Wang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/31 ; H01L23/00 ; H01L21/768 ; H01L21/02 ; H01L21/56 ; H01L23/29

Abstract:
A semiconductor device includes a first conductive feature and a second conductive feature. A first passivation layer is positioned between the first conductive feature and the second conductive feature. A second passivation layer is positioned between the first conductive feature and the second conductive feature and over the first passivation layer. A lowermost portion of an interface where the first passivation layer contacts the second passivation layer is positioned below 40% or above 60% of a height of the first conductive feature.
Public/Granted literature
- US20210249321A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE Public/Granted day:2021-08-12
Information query
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