Invention Grant
- Patent Title: Memory device and method for fabricating the same
-
Application No.: US16728394Application Date: 2019-12-27
-
Publication No.: US11211401B2Publication Date: 2021-12-28
- Inventor: Yao-An Chung , Yuan-Chieh Chiu , Ting-Feng Liao , Kuang-Wen Liu , Kuang-Chao Chen
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11582 ; H01L23/48 ; H01L29/51 ; H01L21/02 ; H01L21/768 ; H01L21/28 ; H01L21/311

Abstract:
A memory device includes a substrate. A first dielectric layer is disposed over the substrate. A plurality of conductive layers and a plurality of dielectric layers are alternately and horizontally disposed on the substrate. A channel column structure is disposed on the substrate and in the conductive layers and the dielectric layers. A side wall of the channel column structure is in contact with the plurality of conductive layers. A second dielectric layer covers the first dielectric layer. A conductive column structure is in the first and second dielectric layers, adjacent to the channel column structure, and in contact with one of the plurality of conductive layers. The conductive column structure includes a liner insulating layer as a shell layer.
Public/Granted literature
- US20210202518A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-07-01
Information query
IPC分类: