Invention Grant
- Patent Title: MEMS-transducer and method for producing a MEMS-transducer
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Application No.: US16533214Application Date: 2019-08-06
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Publication No.: US11212624B2Publication Date: 2021-12-28
- Inventor: Wolfgang Klein , Karolina Gierl , Markus Meyer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: EP18193066 20180906
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B81B3/00 ; H04R31/00

Abstract:
A MEMS-transducer comprises a membrane structure having a first main surface and a second main surface opposing the first main surface. A substrate structure holds the membrane structure, wherein the substrate structure overlaps with the first main surface of the membrane structure in a first edge region being adjacent to a first inner region of the first main surface. A gap is formed between the membrane structure and the substrate structure in the first edge region and extends from the first inner region into the first edge region.
Public/Granted literature
- US20200084549A1 MEMS-TRANSDUCER AND METHOD FOR PRODUCING A MEMS-TRANSDUCER Public/Granted day:2020-03-12
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