Invention Grant
- Patent Title: Semiconductor manufacturing device with embedded fluid conduits
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Application No.: US16540801Application Date: 2019-08-14
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Publication No.: US11213891B2Publication Date: 2022-01-04
- Inventor: Joshua M. Abeshaus , Jordan B. Tye
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Agency: Kacvinsky Daisak Bluni PLLC
- Main IPC: H01J37/317
- IPC: H01J37/317 ; B22F10/20 ; B33Y10/00 ; B33Y80/00 ; B22F5/00

Abstract:
Provided herein are approaches for forming a conduit embedded within a component of a semiconductor manufacturing device (e.g., an ion implanter) using an additive manufacturing process (e.g., 3-D printing), wherein the conduit is configured to deliver a fluid throughout the component to provide heating, cooling, and gas distribution thereof. In one approach, the conduit includes a set of raised surface features formed on an inner surface of the conduit for varying fluid flow characteristics within the conduit. In another approach, the conduit may be formed in a helical configuration. In another approach, the conduit is formed with a polygonal cross section. In another approach, the component of the ion implanter includes at least one of an ion source, a plasma flood gun, a cooling plate, a platen, and/or an arc chamber base.
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