Invention Grant
- Patent Title: Micromechanical device including a covering bond frame
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Application No.: US16648365Application Date: 2018-10-04
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Publication No.: US11214482B2Publication Date: 2022-01-04
- Inventor: Jochen Reinmuth , Martin Rambach
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102017218155.9 20171011
- International Application: PCT/EP2018/077010 WO 20181004
- International Announcement: WO2019/072679 WO 20190418
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81B3/00 ; B81B7/02 ; B81C1/00

Abstract:
A micromechanical device that includes a substrate, a functional layer, and a cap that are situated one above the other in parallel to a main plane of extension. A cavity that is surrounded by a bond frame that extends in parallel to the main plane of extension is formed in the functional layer, the cap being connected to the bond frame. The cavity is situated partially between the bond frame and the substrate in a direction perpendicular to the main plane of extension. A method for manufacturing a micromechanical device is also provided.
Public/Granted literature
- US20200223685A1 MICROMECHANICAL DEVICE INCLUDING A COVERING BOND FRAME Public/Granted day:2020-07-16
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