Compound, resin, resist composition and method for producing resist pattern
Abstract:
Disclosed is a compound represented by formula (I): in formula (I), R1 and R2 each independently represent a hydrogen atom or a methyl group, X1 and X2 each independently represent a group represented by any one of formula (X1−1) to formula (X1−8): A1 and A2 each independently represent an aliphatic hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and —CH2— included in the aliphatic hydrocarbon group may be replaced by —O—, —S—, —CO— or —S(O)2—, and R3 represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —CO— or —S(O)2—.
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