Invention Grant
- Patent Title: Arrangement for coating substrate surfaces by means of electric arc discharge
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Application No.: US16635572Application Date: 2018-07-02
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Publication No.: US11214861B2Publication Date: 2022-01-04
- Inventor: Otmar Zimmer , Frank Kaulfuss
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Jacobson Holman PLLC
- Priority: DE102017213404.6 20170802
- International Application: PCT/EP2018/067771 WO 20180702
- International Announcement: WO2019/025098 WO 20190207
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/32 ; C23C14/06

Abstract:
The invention relates to an arrangement for coating substrate surfaces by means of electric arc discharge in a vacuum chamber, wherein electric arc discharges between a target (1) which is electrically connected as a cathode and is formed from a metal material are used. Arranged at a distance from the target (1) is an anode (2), with which the electric arc discharges are ignited to form a plasma formed with metal material of the target (1). The target (1) is connected to a first electric power source (3) and the anode (2) to a second electric power source (4), wherein the absolute values of the electric voltages connected to the target (1) and to the anode (2) different from one another.
Public/Granted literature
- US20200240002A1 ARRANGEMENT FOR COATING SUBSTRATE SURFACES BY MEANS OF ELECTRIC ARC DISCHARGE Public/Granted day:2020-07-30
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