Invention Grant
- Patent Title: Nozzle head and apparatus
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Application No.: US17066724Application Date: 2020-10-09
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Publication No.: US11214866B2Publication Date: 2022-01-04
- Inventor: Pekka Soininen , Mika Jauhiainen
- Applicant: BENEQ OY
- Applicant Address: FI Espoo
- Assignee: BENEQ OY
- Current Assignee: BENEQ OY
- Current Assignee Address: FI Espoo
- Agency: Carter, DeLuca & Farrell LLP
- Agent Robert P. Michal, Esq.
- Priority: FI20185351 20180412
- Main IPC: C23C16/455
- IPC: C23C16/455 ; B05B1/00

Abstract:
A nozzle head and an apparatus for subjecting a surface of a substrate to successive surface reactions of at least two precursors according to the principles of atomic layer deposition, the nozzle head includes a nozzle head body, a nozzle head output face and gas channels for transporting gas. The nozzle head further includes a first through hole through at least two of the two or more nozzles and a first tube having a tube wall and being fitted into the first through hole, said first tube including gas conduits provided in the tube wall for providing a fluid communication between the first tube and the gas channels in connection with the two or more nozzles.
Public/Granted literature
- US20210025057A1 NOZZLE HEAD AND APPARATUS Public/Granted day:2021-01-28
Information query
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