Invention Grant
- Patent Title: Removing bubbles from plating cell
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Application No.: US16870411Application Date: 2020-05-08
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Publication No.: US11214887B2Publication Date: 2022-01-04
- Inventor: Stephen J. Banik , Bryan L. Buckalew , Gabriel Hay Graham , Alfred Bostick , Sean Wilbur , John Floyd Ostrowski
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: C25B9/00
- IPC: C25B9/00 ; C25D17/00 ; C25D21/04 ; C25D21/14 ; C25D5/08

Abstract:
An electroplating apparatus includes an electrode at the bottom of a chamber, an ionically resistive element with through holes arranged horizontally at the top of the chamber, with a membrane in the middle. One or more panels extend vertically and parallelly from the membrane to the element and extend linearly across the chamber, forming a plurality of regions between the membrane and the element. A substrate with a protuberance extending along a chord of the substrate and contacting a top surface of the element is arranged above a first region. An electrolyte flowed between the substrate and the element descends into the first region via the through holes on a first side of the protuberance and ascends from the first region via the through holes on a second side of the protuberance, forcing air bubbles out from a portion of the element associated with the first region.
Public/Granted literature
- US20200270759A1 REMOVING BUBBLES FROM PLATING CELL Public/Granted day:2020-08-27
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