Invention Grant
- Patent Title: Film forming apparatus for forming metal film
-
Application No.: US16816738Application Date: 2020-03-12
-
Publication No.: US11214889B2Publication Date: 2022-01-04
- Inventor: Yuki Sato
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Oliff PLC
- Priority: JPJP2019-054747 20190322
- Main IPC: C25D17/12
- IPC: C25D17/12 ; C25D17/02 ; C25D7/06 ; C25D17/00

Abstract:
Provided is a film forming apparatus for forming a metal film, capable of uniformly pressurizing a substrate surface with an electrolyte membrane subjected to the fluid pressure of an electrolytic solution containing metal ions during film formation even when an insoluble anode is used. A housing of the apparatus includes a partition member between the anode and the electrolyte membrane, for partitioning a housing chamber into first and second housing chambers. The partition member includes a porous body impregnated with cation exchange resin. The first housing chamber houses the anode insoluble in a first electrolytic solution. The second housing chamber has formed therein a hermetically sealed space in which a second electrolytic solution containing metal ions is enclosed within the housing, by the electrolyte membrane and the partition member. The apparatus is also provided with a pump (pressure unit) that pressurizes the second electrolytic solution in the second housing chamber.
Public/Granted literature
- US20200299855A1 FILM FORMING APPARATUS FOR FORMING METAL FILM Public/Granted day:2020-09-24
Information query