Invention Grant
- Patent Title: Method for manufacturing polycrystalline silicon fragment and method for managing surface metal concentration of polycrystalline silicon fragment
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Application No.: US16607128Application Date: 2018-04-19
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Publication No.: US11214892B2Publication Date: 2022-01-04
- Inventor: Shigeki Nishimura
- Applicant: Tokuyama Corporation
- Applicant Address: JP Yamaguchi
- Assignee: Tokuyama Corporation
- Current Assignee: Tokuyama Corporation
- Current Assignee Address: JP Yamaguchi
- Agency: Cahn & Samuels, LLP
- Priority: JPJP2017-085404 20170424
- International Application: PCT/JP2018/016217 WO 20180419
- International Announcement: WO2018/198947 WO 20181101
- Main IPC: C30B33/00
- IPC: C30B33/00 ; C30B29/06 ; C30B29/66 ; C30B33/10

Abstract:
A method for manufacturing polycrystalline silicon fragments includes producing a polycrystalline silicon rod by the Siemens method; crushing the polycrystalline silicon rod to obtain polycrystalline silicon fragments; and cleaning by etching the polycrystalline silicon fragments in a cleaning tank. In the cleaning, small pieces of the polycrystalline silicon having controlled shapes and sizes are present in the cleaning tank and the weight change of the small pieces of the polycrystalline silicon before and after the etching is measured to thereby manage the cleaning.
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