Invention Grant
- Patent Title: Fluid sealing device and pressure detector calibration device
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Application No.: US16426107Application Date: 2019-05-30
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Publication No.: US11215374B2Publication Date: 2022-01-04
- Inventor: Masahiko Takimoto , Masaaki Nagase
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Studebaker & Brackett PC
- Priority: JPJP2018-104671 20180531
- Main IPC: F24F11/30
- IPC: F24F11/30 ; F24F11/72 ; F24F11/80 ; G01L27/00 ; F16K17/164

Abstract:
A fluid sealing device and a pressure detector calibration device are provided to enable further reducing of errors between a sealing pressure and a set pressure in a fluid flow path.
The fluid sealing device includes a pressure sealing structure having a fluid inlet, a fluid outlet, and a fluid flow path formed therein, a temperature controller, a temperature detector, a pressure detector, an inlet-side on-off valve, an outlet-side on-off valve, a restriction part, a fluid supply device, a fluid sealing controller for sealing the fluid in the pressure sealing structure by controlling the fluid supply device, the inlet-side on-off valve, and the outlet-side on-off valve, wherein the fluid sealing controller opens the outlet-side on-off valve after increasing the pressure in the fluid sealing structure to a primary pressure higher than the set pressure, and closes the outlet-side on-off valve when a value detected from the pressure detector becomes a corrected set pressure by an error correction value corresponding to a temperature detected by the temperature detector at the set pressure.
The fluid sealing device includes a pressure sealing structure having a fluid inlet, a fluid outlet, and a fluid flow path formed therein, a temperature controller, a temperature detector, a pressure detector, an inlet-side on-off valve, an outlet-side on-off valve, a restriction part, a fluid supply device, a fluid sealing controller for sealing the fluid in the pressure sealing structure by controlling the fluid supply device, the inlet-side on-off valve, and the outlet-side on-off valve, wherein the fluid sealing controller opens the outlet-side on-off valve after increasing the pressure in the fluid sealing structure to a primary pressure higher than the set pressure, and closes the outlet-side on-off valve when a value detected from the pressure detector becomes a corrected set pressure by an error correction value corresponding to a temperature detected by the temperature detector at the set pressure.
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